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    Crystallite misorientation analysis in semiconductor wafers and ELO samples by rocking curve imaging

    New search for: Mikulik, P.
    New search for: Lubbert, D.
    New search for: Pernot, P.
    New search for: Helfen, L.
    New search for: Baumbach, T.

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    Crystallite misorientation analysis in semiconductor wafers and ELO samples by rocking curve imaging

    New search for: Mikulik, P.
    New search for: Lubbert, D.
    New search for: Pernot, P.
    New search for: Helfen, L.
    New search for: Baumbach, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Crystallite misorientation analysis in semiconductor wafers and ELO samples by rocking curve imaging

    New search for: Mikulik, P.
    New search for: Lubbert, D.
    New search for: Pernot, P.
    New search for: Helfen, L.
    New search for: Baumbach, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Crystallite misorientation analysis in semiconductor wafers and ELO samples by rocking curve imaging

    Contributors:

    Mikulik, P. (author) / Lubbert, D. (author) / Pernot, P. (author) / Helfen, L. (author) / Baumbach, T. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 253 ; 188-193

    Publication date:

    2006-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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