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Fabrication and characterization of facing-target reactive sputtered polycrystalline TiO2 films

Li, G. K. / Shen, J. J. / Mi, W. B. / Li, Z. Q. / Wu, P. / Jiang, E. Y. / Bai, H. L.

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Fabrication and characterization of facing-target reactive sputtered polycrystalline TiO2 films

Li, G. K. / Shen, J. J. / Mi, W. B. / Li, Z. Q. / Wu, P. / Jiang, E. Y. / Bai, H. L.

Fabrication and characterization of facing-target reactive sputtered polycrystalline TiO2 films

Li, G. K. / Shen, J. J. / Mi, W. B. / Li, Z. Q. / Wu, P. / Jiang, E. Y. / Bai, H. L.

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Document information

Title:

Fabrication and characterization of facing-target reactive sputtered polycrystalline TiO2 films

Contributors:

Li, G. K. (author) / Shen, J. J. (author) / Mi, W. B. (author) / Li, Z. Q. (author) / Wu, P. (author) / Jiang, E. Y. (author) / Bai, H. L. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 425-431

Publication date:

2006-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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