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Monte Carlo simulations of Formula Not Shown -doping placement in sub-100 nm implant free InGaAs MOSFETs
Monte Carlo simulations of Formula Not Shown -doping placement in sub-100 nm implant free InGaAs MOSFETs
Monte Carlo simulations of Formula Not Shown -doping placement in sub-100 nm implant free InGaAs MOSFETs
Kalna, K. (author) / Wang, Q. (author) / Passlack, M. (author) / Asenov, A. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 135 ; 285-288
2006-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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