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The effect of hydrogen as an additive in reactive ion etching of GaAs for obtaining polished surface
The effect of hydrogen as an additive in reactive ion etching of GaAs for obtaining polished surface
The effect of hydrogen as an additive in reactive ion etching of GaAs for obtaining polished surface
Dultsev, F. N. (author) / Nenasheva, L. A. (author)
APPLIED SURFACE SCIENCE ; 253 ; 1287-1290
2006-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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