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Microtrench of oxynitride thin films in a C2F6 inductively coupled plasma
Microtrench of oxynitride thin films in a C2F6 inductively coupled plasma
Microtrench of oxynitride thin films in a C2F6 inductively coupled plasma
Kim, B. (author) / Lee, B. T. (author)
APPLIED SURFACE SCIENCE ; 253 ; 1464-1468
2006-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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