Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Augmented CMP Techniques for Silicon Carbide

    New search for: Kuo, P.
    New search for: Currier, I.
    New search for: Devaty, R. P.
    New search for: Larkin, D. J.
    New search for: Saddow, S. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Augmented CMP Techniques for Silicon Carbide

    New search for: Kuo, P.
    New search for: Currier, I.
    New search for: Devaty, R. P.
    New search for: Larkin, D. J.
    New search for: Saddow, S. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Augmented CMP Techniques for Silicon Carbide

    New search for: Kuo, P.
    New search for: Currier, I.
    New search for: Devaty, R. P.
    New search for: Larkin, D. J.
    New search for: Saddow, S. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Augmented CMP Techniques for Silicon Carbide

    Contributors:

    Kuo, P. (author) / Currier, I. (author) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.

    Published in:

    Silicon Carbide and Related Materials - 2005 ; 1099-1102

    MATERIALS SCIENCE FORUM ; 527/529

    Publication date:

    2006-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Silicon Carbide Fiber Reinforced Recrystallized Silicon Carbide

    Kriegesmann, J. / Schumacher, M. | British Library Online Contents | 2004

    SILICON CARBIDE FIBER-REINFORCED SILICON CARBIDE COMPOSITE

    HINOKI TATSUYA / SHIMODA KAZUYA | European Patent Office | 2020

    Free access

    Advanced Processing Techniques for Silicon Carbide MEMS and NEMS

    Zorman, C. A. / Mehregany, M. | British Library Online Contents | 2004

    Comparative wear mapping techniques: I. Friction and wear mapping of tungsten carbide / silicon carbide

    Alcock, J. / Toft Soerensen, O. / Jensen, S. et al. | British Library Online Contents | 1996

    Silicon carbide

    British Library Online Contents | 2004

    Back to top