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Growth Kinetics and Polytype Stability in Halide Chemical Vapor Deposition of SiC
Growth Kinetics and Polytype Stability in Halide Chemical Vapor Deposition of SiC
Growth Kinetics and Polytype Stability in Halide Chemical Vapor Deposition of SiC
Nigam, S. (author) / Chung, H. J. (author) / Huh, S. W. (author) / Grim, J. (author) / Polyakov, A. Y. (author) / Fanton, M. A. (author) / Weiland, B. (author) / Snyder, D. W. (author) / Skowronski, M. (author) / Devaty, R. P.
2006-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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