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Growth of Bulk SiC by Halide Chemical Vapor Deposition
Growth of Bulk SiC by Halide Chemical Vapor Deposition
Growth of Bulk SiC by Halide Chemical Vapor Deposition
Fanton, M. (author) / Skowronski, M. (author) / Snyder, D. (author) / Chung, H. J. (author) / Nigam, S. (author) / Weiland, B. (author) / Huh, S. W. (author)
MATERIALS SCIENCE FORUM ; 457/460 ; 87-90
2004-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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