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Resistivity Distribution in Undoped 6H-SiC Boules and Wafers

Li, Q. / Polyakov, A. Y. / Skowronski, M. / Sanchez, E. K. / Loboda, M. J. / Fanton, M. A. / Bogart, T. / Gamble, D. / Smirnov, N. B. / Makarov, Y. N.

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Resistivity Distribution in Undoped 6H-SiC Boules and Wafers

Li, Q. / Polyakov, A. Y. / Skowronski, M. / Sanchez, E. K. / Loboda, M. J. / Fanton, M. A. / Bogart, T. / Gamble, D. / Smirnov, N. B. / Makarov, Y. N.

Resistivity Distribution in Undoped 6H-SiC Boules and Wafers

Li, Q. / Polyakov, A. Y. / Skowronski, M. / Sanchez, E. K. / Loboda, M. J. / Fanton, M. A. / Bogart, T. / Gamble, D. / Smirnov, N. B. / Makarov, Y. N.

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Title:

Resistivity Distribution in Undoped 6H-SiC Boules and Wafers

Contributors:

Li, Q. (author) / Polyakov, A. Y. (author) / Skowronski, M. (author) / Sanchez, E. K. (author) / Loboda, M. J. (author) / Fanton, M. A. (author) / Bogart, T. (author) / Gamble, D. (author) / Smirnov, N. B. (author) / Makarov, Y. N. (author)

Published in:

Silicon Carbide and Related Materials - 2005 ; 51-54

MATERIALS SCIENCE FORUM ; 527/529

Publication date:

2006-01-01

Size:

4 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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