SiC-4H Epitaxial Layer Growth Using Trichlorosilane (TCS) as Silicon Precursor: Fid-Bau Portal

SiC-4H Epitaxial Layer Growth Using Trichlorosilane (TCS) as Silicon Precursor

Leone, S. / Mauceri, M. / Pistone, G. / Abbondanza, G. / Portuese, F. / Abagnale, G. / Valente, G. L. / Crippa, D. / Barbera, M. / Reitano, R.

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SiC-4H Epitaxial Layer Growth Using Trichlorosilane (TCS) as Silicon Precursor

Leone, S. / Mauceri, M. / Pistone, G. / Abbondanza, G. / Portuese, F. / Abagnale, G. / Valente, G. L. / Crippa, D. / Barbera, M. / Reitano, R.

SiC-4H Epitaxial Layer Growth Using Trichlorosilane (TCS) as Silicon Precursor

Leone, S. / Mauceri, M. / Pistone, G. / Abbondanza, G. / Portuese, F. / Abagnale, G. / Valente, G. L. / Crippa, D. / Barbera, M. / Reitano, R.

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Title:

SiC-4H Epitaxial Layer Growth Using Trichlorosilane (TCS) as Silicon Precursor

Contributors:

Leone, S. (author) / Mauceri, M. (author) / Pistone, G. (author) / Abbondanza, G. (author) / Portuese, F. (author) / Abagnale, G. (author) / Valente, G. L. (author) / Crippa, D. (author) / Barbera, M. (author) / Reitano, R. (author)

Published in:

Silicon Carbide and Related Materials - 2005 ; 179-182

MATERIALS SCIENCE FORUM ; 527/529

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

La Via, F. / Izzo, G. / Mauceri, M. et al. | British Library Online Contents | 2009

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Condorelli, G. / Mauceri, M. / Pistone, G. et al. | British Library Online Contents | 2009

4H-SiC Epitaxial Growth on 2^o Off-Axis Substrates using Trichlorosilane (TCS)

Aigo, T. / Ito, W. / Tsuge, H. et al. | British Library Online Contents | 2012

3C-SiC Heteroepitaxy on (100), (111) and (110) Si Using Trichlorosilane (TCS) as the Silicon Precursor

Anzalone, R. / Severino, A. / D Arrigo, G. et al. | British Library Online Contents | 2009

Epitaxial Growth and Characterization of Phosphorus Doped SiC Using TBP as Precursor

Henry, A. / Janzen, E. | British Library Online Contents | 2005