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Annealing effects on the microstructure of amorphous carbon nitride films

Wang, X. C. / Li, Z. Q. / Wu, P. / Jiang, E. Y. / Bai, H. L.

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Annealing effects on the microstructure of amorphous carbon nitride films

Wang, X. C. / Li, Z. Q. / Wu, P. / Jiang, E. Y. / Bai, H. L.

Annealing effects on the microstructure of amorphous carbon nitride films

Wang, X. C. / Li, Z. Q. / Wu, P. / Jiang, E. Y. / Bai, H. L.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Annealing effects on the microstructure of amorphous carbon nitride films

Contributors:

Wang, X. C. (author) / Li, Z. Q. (author) / Wu, P. (author) / Jiang, E. Y. (author) / Bai, H. L. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 2087-2092

Publication date:

2006-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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