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Effect of Al incorporation on the AlGaN growth by metalorganic chemical vapor deposition

Zhao, D. G. / Liu, Z. S. / Zhu, J. J. / Zhang, S. M. / Jiang, D. S. / Yang, H. / Liang, J. W. / Li, X. Y. / Gong, H. M.

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Effect of Al incorporation on the AlGaN growth by metalorganic chemical vapor deposition

Zhao, D. G. / Liu, Z. S. / Zhu, J. J. / Zhang, S. M. / Jiang, D. S. / Yang, H. / Liang, J. W. / Li, X. Y. / Gong, H. M.

Effect of Al incorporation on the AlGaN growth by metalorganic chemical vapor deposition

Zhao, D. G. / Liu, Z. S. / Zhu, J. J. / Zhang, S. M. / Jiang, D. S. / Yang, H. / Liang, J. W. / Li, X. Y. / Gong, H. M.

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Document information

Title:

Effect of Al incorporation on the AlGaN growth by metalorganic chemical vapor deposition

Contributors:

Zhao, D. G. (author) / Liu, Z. S. (author) / Zhu, J. J. (author) / Zhang, S. M. (author) / Jiang, D. S. (author) / Yang, H. (author) / Liang, J. W. (author) / Li, X. Y. (author) / Gong, H. M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 2452-2455

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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