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    Implantation and diffusion of phosphorous in germanium

    New search for: Chroneos, A.
    New search for: Skarlatos, D.
    New search for: Tsamis, C.
    New search for: Christofi, A.
    New search for: McPhail, D. S.
    New search for: Hung, R.

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    Implantation and diffusion of phosphorous in germanium

    New search for: Chroneos, A.
    New search for: Skarlatos, D.
    New search for: Tsamis, C.
    New search for: Christofi, A.
    New search for: McPhail, D. S.
    New search for: Hung, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Implantation and diffusion of phosphorous in germanium

    New search for: Chroneos, A.
    New search for: Skarlatos, D.
    New search for: Tsamis, C.
    New search for: Christofi, A.
    New search for: McPhail, D. S.
    New search for: Hung, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Implantation and diffusion of phosphorous in germanium

    Contributors:

    Chroneos, A. (author) / Skarlatos, D. (author) / Tsamis, C. (author) / Christofi, A. (author) / McPhail, D. S. (author) / Hung, R. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 640-643

    Publication date:

    2006-01-01

    Size:

    4 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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