Phosphorus diffusion in germanium following implantation and excimer laser annealing: Fid-Bau Portal

Phosphorus diffusion in germanium following implantation and excimer laser annealing

Wang, C. / Li, C. / Huang, S. / Lu, W. / Yan, G. / Zhang, M. / Wu, H. / Lin, G. / Wei, J. / Huang, W.

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Phosphorus diffusion in germanium following implantation and excimer laser annealing

Wang, C. / Li, C. / Huang, S. / Lu, W. / Yan, G. / Zhang, M. / Wu, H. / Lin, G. / Wei, J. / Huang, W.

Phosphorus diffusion in germanium following implantation and excimer laser annealing

Wang, C. / Li, C. / Huang, S. / Lu, W. / Yan, G. / Zhang, M. / Wu, H. / Lin, G. / Wei, J. / Huang, W.

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Document information

Title:

Phosphorus diffusion in germanium following implantation and excimer laser annealing

Contributors:

Wang, C. (author) / Li, C. (author) / Huang, S. (author) / Lu, W. (author) / Yan, G. (author) / Zhang, M. (author) / Wu, H. (author) / Lin, G. (author) / Wei, J. (author) / Huang, W. (author)

Published in:

APPLIED SURFACE SCIENCE ; 300 ; 208-212

Publication date:

2014-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Sedky, S. / Schroeder, J. / Sands, T. et al. | British Library Online Contents | 2004

Implantation and diffusion of phosphorous in germanium

Chroneos, A. / Skarlatos, D. / Tsamis, C. et al. | British Library Online Contents | 2006

Diffusion of phosphorus implanted in germanium

Canneaux, T. / Mathiot, D. / Ponpon, J. P. et al. | British Library Online Contents | 2008

Diffusion and activation of phosphorus in germanium

Tsouroutas, P. / Tsoukalas, D. / Zergioti, I. et al. | British Library Online Contents | 2008

Excimer Laser Annealing of Ion-Implanted 6H-Silicon Carbide

Hishida, Y. / Watanabe, M. / Nakashima, K. et al. | British Library Online Contents | 2000