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Nanoscale materials patterning and engineering by atomic force microscopy nanolithography

Xie, X. N. / Chung, H. J. / Sow, C. H. / Wee, A. T.

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Nanoscale materials patterning and engineering by atomic force microscopy nanolithography

Xie, X. N. / Chung, H. J. / Sow, C. H. / Wee, A. T.

Nanoscale materials patterning and engineering by atomic force microscopy nanolithography

Xie, X. N. / Chung, H. J. / Sow, C. H. / Wee, A. T.

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Order at Subito €

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Document information

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Document information

Title:

Nanoscale materials patterning and engineering by atomic force microscopy nanolithography

Contributors:

Xie, X. N. (author) / Chung, H. J. (author) / Sow, C. H. (author) / Wee, A. T. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING R REPORTS -LAUSANNE- ; 54 ; 1-48

Publication date:

2006-01-01

Size:

48 pages

ISSN:

0927-796X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1 / 530

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