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    Patterning at the nanoscale: Atomic force microscopy and extreme ultraviolet interference lithography

    New search for: Parisse, P.
    New search for: Luciani, D.
    New search for: D'Angelo, A.
    New search for: Santucci, S.
    New search for: Zuppella, P.
    New search for: Tucceri, P.
    New search for: Reale, A.
    New search for: Ottaviano, L.

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    Patterning at the nanoscale: Atomic force microscopy and extreme ultraviolet interference lithography

    New search for: Parisse, P.
    New search for: Luciani, D.
    New search for: D'Angelo, A.
    New search for: Santucci, S.
    New search for: Zuppella, P.
    New search for: Tucceri, P.
    New search for: Reale, A.
    New search for: Ottaviano, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Patterning at the nanoscale: Atomic force microscopy and extreme ultraviolet interference lithography

    New search for: Parisse, P.
    New search for: Luciani, D.
    New search for: D'Angelo, A.
    New search for: Santucci, S.
    New search for: Zuppella, P.
    New search for: Tucceri, P.
    New search for: Reale, A.
    New search for: Ottaviano, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Patterning at the nanoscale: Atomic force microscopy and extreme ultraviolet interference lithography

    Contributors:

    Parisse, P. (author) / Luciani, D. (author) / D'Angelo, A. (author) / Santucci, S. (author) / Zuppella, P. (author) / Tucceri, P. (author) / Reale, A. (author) / Ottaviano, L. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 165 ; 227-230

    Publication date:

    2009-01-01

    Size:

    4 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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