Structure analysis of the system Hafnium/Silicon Formula Not Shown by means of X-ray photoelectron spectroscopy and X-ray photoelectron diffraction (XPD): Fid-Bau Portal

Structure analysis of the system Hafnium/Silicon Formula Not Shown by means of X-ray photoelectron spectroscopy and X-ray photoelectron diffraction (XPD)

Fluchter, C. R. / de Siervo, A. / Weier, D. / Schurmann, M. / Berges, U. / Dreiner, S. / Carazzolle, M. F. / Landers, R. / Kleiman, G. G. / Westphal, C.

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Structure analysis of the system Hafnium/Silicon Formula Not Shown by means of X-ray photoelectron spectroscopy and X-ray photoelectron diffraction (XPD)

Fluchter, C. R. / de Siervo, A. / Weier, D. / Schurmann, M. / Berges, U. / Dreiner, S. / Carazzolle, M. F. / Landers, R. / Kleiman, G. G. / Westphal, C.

Structure analysis of the system Hafnium/Silicon Formula Not Shown by means of X-ray photoelectron spectroscopy and X-ray photoelectron diffraction (XPD)

Fluchter, C. R. / de Siervo, A. / Weier, D. / Schurmann, M. / Berges, U. / Dreiner, S. / Carazzolle, M. F. / Landers, R. / Kleiman, G. G. / Westphal, C.

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Order at Subito €

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Title:

Structure analysis of the system Hafnium/Silicon Formula Not Shown by means of X-ray photoelectron spectroscopy and X-ray photoelectron diffraction (XPD)

Contributors:

Fluchter, C. R. (author) / de Siervo, A. (author) / Weier, D. (author) / Schurmann, M. (author) / Berges, U. (author) / Dreiner, S. (author) / Carazzolle, M. F. (author) / Landers, R. (author) / Kleiman, G. G. (author) / Westphal, C. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 1049-1054

Publication date:

2006-01-01

Size:

6 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

Weier, D. / Fluchter, C. / de Siervo, A. et al. | British Library Online Contents | 2006

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