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    Characterization of rare earth oxides based MOSFET gate stacks prepared by metal-organic chemical vapour deposition

    New search for: Frohlich, K.
    New search for: Luptak, R.
    New search for: Dobrocka, E.
    New search for: Husekova, K.
    New search for: Cico, K.
    New search for: Rosova, A.
    New search for: Lukosius, M.
    New search for: Abrutis, A.
    New search for: Pisecny, P.
    New search for: Espinos, J. P.

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    Characterization of rare earth oxides based MOSFET gate stacks prepared by metal-organic chemical vapour deposition

    New search for: Frohlich, K.
    New search for: Luptak, R.
    New search for: Dobrocka, E.
    New search for: Husekova, K.
    New search for: Cico, K.
    New search for: Rosova, A.
    New search for: Lukosius, M.
    New search for: Abrutis, A.
    New search for: Pisecny, P.
    New search for: Espinos, J. P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characterization of rare earth oxides based MOSFET gate stacks prepared by metal-organic chemical vapour deposition

    New search for: Frohlich, K.
    New search for: Luptak, R.
    New search for: Dobrocka, E.
    New search for: Husekova, K.
    New search for: Cico, K.
    New search for: Rosova, A.
    New search for: Lukosius, M.
    New search for: Abrutis, A.
    New search for: Pisecny, P.
    New search for: Espinos, J. P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    Characterization of rare earth oxides based MOSFET gate stacks prepared by metal-organic chemical vapour deposition

    Contributors:

    Frohlich, K. (author) / Luptak, R. (author) / Dobrocka, E. (author) / Husekova, K. (author) / Cico, K. (author) / Rosova, A. (author) / Lukosius, M. (author) / Abrutis, A. (author) / Pisecny, P. (author) / Espinos, J. P. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 1065-1072

    Publication date:

    2006-01-01

    Size:

    8 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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