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Praseodymium based high-k dielectrics grown on Si and SiC substrates

Lo Nigro, R. / Toro, R. G. / Malandrino, G. / Fragala, I. L. / Raineri, V. / Fiorenza, P.

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Praseodymium based high-k dielectrics grown on Si and SiC substrates

Lo Nigro, R. / Toro, R. G. / Malandrino, G. / Fragala, I. L. / Raineri, V. / Fiorenza, P.

Praseodymium based high-k dielectrics grown on Si and SiC substrates

Lo Nigro, R. / Toro, R. G. / Malandrino, G. / Fragala, I. L. / Raineri, V. / Fiorenza, P.

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Title:

Praseodymium based high-k dielectrics grown on Si and SiC substrates

Contributors:

Lo Nigro, R. (author) / Toro, R. G. (author) / Malandrino, G. (author) / Fragala, I. L. (author) / Raineri, V. (author) / Fiorenza, P. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 1073-1078

Publication date:

2006-01-01

Size:

6 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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