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High temperature characterization of high-k dielectrics on SiC
High temperature characterization of high-k dielectrics on SiC
High temperature characterization of high-k dielectrics on SiC
Weng, M. H. (author) / Mahapatra, R. (author) / Tappin, P. (author) / Miao, B. (author) / Chattopadhyay, S. (author) / Horsfall, A. B. (author) / Wright, N. G. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 1133-1136
2006-01-01
4 pages
Article (Journal)
English
DDC:
621.38152
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