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High temperature characterization of high-k dielectrics on SiC
High temperature characterization of high-k dielectrics on SiC
High temperature characterization of high-k dielectrics on SiC
Weng, M. H. (Autor:in) / Mahapatra, R. (Autor:in) / Tappin, P. (Autor:in) / Miao, B. (Autor:in) / Chattopadhyay, S. (Autor:in) / Horsfall, A. B. (Autor:in) / Wright, N. G. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 1133-1136
01.01.2006
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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