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A calibrated atomic force microscope using an orthogonal scanner and a calibrated laser interferometer

Lee, D. Y. / Kim, D. M. / Gweon, D. G. / Park, J.

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A calibrated atomic force microscope using an orthogonal scanner and a calibrated laser interferometer

Lee, D. Y. / Kim, D. M. / Gweon, D. G. / Park, J.

A calibrated atomic force microscope using an orthogonal scanner and a calibrated laser interferometer

Lee, D. Y. / Kim, D. M. / Gweon, D. G. / Park, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

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Document information

Title:

A calibrated atomic force microscope using an orthogonal scanner and a calibrated laser interferometer

Contributors:

Lee, D. Y. (author) / Kim, D. M. (author) / Gweon, D. G. (author) / Park, J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 3945-3951

Publication date:

2007-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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