Formation and Characterization of 3C-SIC by Carbon-Ion Implantation into Silicon with a MEVVA Ion Source: Fid-Bau Portal

Formation and Characterization of 3C-SIC by Carbon-Ion Implantation into Silicon with a MEVVA Ion Source

Wan, Y.Z. / Xiong, G.Y. / Song, F. / Luo, H.L. / Huang, Y. / He, F. / Guo, L.B. / Wang, Y.L.

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Formation and Characterization of 3C-SIC by Carbon-Ion Implantation into Silicon with a MEVVA Ion Source

Wan, Y.Z. / Xiong, G.Y. / Song, F. / Luo, H.L. / Huang, Y. / He, F. / Guo, L.B. / Wang, Y.L.

Formation and Characterization of 3C-SIC by Carbon-Ion Implantation into Silicon with a MEVVA Ion Source

Wan, Y.Z. / Xiong, G.Y. / Song, F. / Luo, H.L. / Huang, Y. / He, F. / Guo, L.B. / Wang, Y.L.

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Title:

Formation and Characterization of 3C-SIC by Carbon-Ion Implantation into Silicon with a MEVVA Ion Source

Contributors:

Wan, Y.Z. (author) / Xiong, G.Y. (author) / Song, F. (author) / Luo, H.L. (author) / Huang, Y. (author) / He, F. (author) / Guo, L.B. (author) / Wang, Y.L. (author)

Published in:

SURFACE REVIEW AND LETTERS ; 14 ; 1103-1106

Publication date:

2007-01-01

Size:

4 pages

ISSN:

0218-625X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 530.417

Guo, L. B. / Wang, Y. L. / Song, F. et al. | British Library Online Contents | 2007

Phase Transformation and Ion-Beam-Induced Crystallization in SiC Layers Formed by MEVVA Implantation of Carbon Into Silicon

Chen, D. / Wong, S. P. / Ho, L. C. et al. | British Library Conference Proceedings | 1998

Characterization of Surface Properties and Microstructure of PVD-TiN Films Using MEVVA Ion Implantation

Yang, J. H. / Cheng, M. F. / Luo, X. D. et al. | British Library Online Contents | 2006

High-Quality Semiconductor Carbon-Doped beta-FeSi~2 Film Synthesized by MEVVA Ion Implantation

Li, X. / Dong, C. / Xu, L. | British Library Online Contents | 2005

Tribological properties changes of H13 steel induced by MEVVA Ta ion implantation

Jianhua, Y. / Tonghe, Z. | British Library Online Contents | 2004