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Deposition of crystalline C3N4 films via microwave plasma chemical vapour deposition

Jiang, J. / Cheng, W. / Zhang, Y. / Lan, M. / Zhu, H. / Shen, D.

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Deposition of crystalline C3N4 films via microwave plasma chemical vapour deposition

Jiang, J. / Cheng, W. / Zhang, Y. / Lan, M. / Zhu, H. / Shen, D.

Deposition of crystalline C3N4 films via microwave plasma chemical vapour deposition

Jiang, J. / Cheng, W. / Zhang, Y. / Lan, M. / Zhu, H. / Shen, D.

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Document information

Title:

Deposition of crystalline C3N4 films via microwave plasma chemical vapour deposition

Contributors:

Jiang, J. (author) / Cheng, W. (author) / Zhang, Y. (author) / Lan, M. (author) / Zhu, H. (author) / Shen, D. (author)

Published in:

MATERIALS LETTERS ; 61 ; 2243-2246

Publication date:

2007-01-01

Size:

4 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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