Etching reaction of methylchloride molecule on the GaAs (001)-2x4 surface: Fid-Bau Portal

Etching reaction of methylchloride molecule on the GaAs (001)-2x4 surface

Ozeki, M. / Iwasa, Y. / Shimizu, Y.

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Etching reaction of methylchloride molecule on the GaAs (001)-2x4 surface

Ozeki, M. / Iwasa, Y. / Shimizu, Y.

Etching reaction of methylchloride molecule on the GaAs (001)-2x4 surface

Ozeki, M. / Iwasa, Y. / Shimizu, Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Etching reaction of methylchloride molecule on the GaAs (001)-2x4 surface

Contributors:

Ozeki, M. (author) / Iwasa, Y. (author) / Shimizu, Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 5914-5919

Publication date:

2007-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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