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Microstructure and electrical characterization based on AFM of very high-doped polysilicon grains
Microstructure and electrical characterization based on AFM of very high-doped polysilicon grains
Microstructure and electrical characterization based on AFM of very high-doped polysilicon grains
Coq Germanicus, R. (author) / Picard, E. (author) / Domenges, B. (author) / Danilo, K. (author) / Rogel, R. (author)
APPLIED SURFACE SCIENCE ; 253 ; 6006-6012
2007-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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