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Modelling and analysis of MEMS sensor based on piezoresistive effects
Modelling and analysis of MEMS sensor based on piezoresistive effects
Modelling and analysis of MEMS sensor based on piezoresistive effects
Kaabi, L. (author) / Kaabi, A. (author) / Sakly, J. (author) / AbdelMalek, F. (author)
2007-01-01
4 pages
Article (Journal)
English
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