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    A SOI-MEMS Piezoresistive Atmosphere Pressure Sensor

    New search for: Du, L.D.
    New search for: Zhao, Z.
    New search for: Xiao, L.
    New search for: Zhang, M.Y.
    New search for: Fang, Z.
    New search for: Tang, F.

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    A SOI-MEMS Piezoresistive Atmosphere Pressure Sensor

    New search for: Du, L.D.
    New search for: Zhao, Z.
    New search for: Xiao, L.
    New search for: Zhang, M.Y.
    New search for: Fang, Z.
    New search for: Tang, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    A SOI-MEMS Piezoresistive Atmosphere Pressure Sensor

    New search for: Du, L.D.
    New search for: Zhao, Z.
    New search for: Xiao, L.
    New search for: Zhang, M.Y.
    New search for: Fang, Z.
    New search for: Tang, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    A SOI-MEMS Piezoresistive Atmosphere Pressure Sensor

    Contributors:

    Du, L.D. (author) / Zhao, Z. (author) / Xiao, L. (author) / Zhang, M.Y. (author) / Fang, Z. (author) / Tang, F.

    Published in:

    Micro-Nano Technology XIV ; 394-397

    KEY ENGINEERING MATERIALS ; 562/565

    Publication date:

    2013-01-01

    Size:

    4 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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