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MEMS based low cost piezoresistive microcantilever force sensor and sensor module

Pandya, H. J. / Kim, H. T. / Roy, R. / Desai, J. P.

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MEMS based low cost piezoresistive microcantilever force sensor and sensor module

Pandya, H. J. / Kim, H. T. / Roy, R. / Desai, J. P.

MEMS based low cost piezoresistive microcantilever force sensor and sensor module

Pandya, H. J. / Kim, H. T. / Roy, R. / Desai, J. P.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

MEMS based low cost piezoresistive microcantilever force sensor and sensor module

Contributors:

Pandya, H. J. (author) / Kim, H. T. (author) / Roy, R. (author) / Desai, J. P. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 19 ; 163-173

Publication date:

2014-01-01

Size:

11 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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