Nano- and micro-scale patterning of Si (100) under keV ion irradiation: Fid-Bau Portal

Nano- and micro-scale patterning of Si (100) under keV ion irradiation

Katharria, Y. S. / Kumar, S. / Tarun Sharma, A. / Kanjilal, D.

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Nano- and micro-scale patterning of Si (100) under keV ion irradiation

Katharria, Y. S. / Kumar, S. / Tarun Sharma, A. / Kanjilal, D.

Nano- and micro-scale patterning of Si (100) under keV ion irradiation

Katharria, Y. S. / Kumar, S. / Tarun Sharma, A. / Kanjilal, D.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Nano- and micro-scale patterning of Si (100) under keV ion irradiation

Contributors:

Katharria, Y. S. (author) / Kumar, S. (author) / Tarun Sharma, A. (author) / Kanjilal, D. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 6824-6828

Publication date:

2007-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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