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Nanomechanical studies of ultrathin polymeric resist films
Nanomechanical studies of ultrathin polymeric resist films
Nanomechanical studies of ultrathin polymeric resist films
Koszewski, A. (author) / Gorski, T. (author) / Reuther, F. (author) / Rymuza, Z. (author)
INTERNATIONAL JOURNAL OF MATERIALS RESEARCH ; 98 ; 393-396
2007-01-01
4 pages
Article (Journal)
English
DDC:
669.9
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