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    CVD Synthesis of Tungsten Nitride and Its Deposition Behavior

    New search for: Nagai, M.
    New search for: Nakaya, H.
    New search for: Mandal, H.

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    CVD Synthesis of Tungsten Nitride and Its Deposition Behavior

    New search for: Nagai, M.
    New search for: Nakaya, H.
    New search for: Mandal, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    CVD Synthesis of Tungsten Nitride and Its Deposition Behavior

    New search for: Nagai, M.
    New search for: Nakaya, H.
    New search for: Mandal, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    CVD Synthesis of Tungsten Nitride and Its Deposition Behavior

    Contributors:

    Nagai, M. (author) / Nakaya, H. (author) / Mandal, H.

    Published in:

    Nitrides and Oxynitrides III ; 65-70

    MATERIALS SCIENCE FORUM ; 554

    Publication date:

    2007-01-01

    Size:

    6 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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