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    Cross-sectional nanoindentation for copper adhesion characterization in blanket and patterned interconnect structures: experiments and three-dimensional FEM modeling

    New search for: Roy, S. b.
    New search for: Darque-Ceretti, E.
    New search for: Felder, E.
    New search for: Monchoix, H.

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    Cross-sectional nanoindentation for copper adhesion characterization in blanket and patterned interconnect structures: experiments and three-dimensional FEM modeling

    New search for: Roy, S. b.
    New search for: Darque-Ceretti, E.
    New search for: Felder, E.
    New search for: Monchoix, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Cross-sectional nanoindentation for copper adhesion characterization in blanket and patterned interconnect structures: experiments and three-dimensional FEM modeling

    New search for: Roy, S. b.
    New search for: Darque-Ceretti, E.
    New search for: Felder, E.
    New search for: Monchoix, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Cross-sectional nanoindentation for copper adhesion characterization in blanket and patterned interconnect structures: experiments and three-dimensional FEM modeling

    Contributors:

    Roy, S. b. (author) / Darque-Ceretti, E. (author) / Felder, E. (author) / Monchoix, H. (author)

    Published in:

    INTERNATIONAL JOURNAL OF FRACTURE ; 144 ; 21-33

    Publication date:

    2007-01-01

    Size:

    13 pages

    ISSN:

    0376-9429

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1126

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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