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Numerical Modeling of RF Magnetron Sputtering with Metallic or Dielectric Target
Numerical Modeling of RF Magnetron Sputtering with Metallic or Dielectric Target
Numerical Modeling of RF Magnetron Sputtering with Metallic or Dielectric Target
Makabe, T. (author) / Yagisawa, T. (author) / Uskokovic, D. P. / Milonjic, S. K. / Rakovic, D. I.
2007-01-01
8 pages
Article (Journal)
English
DDC:
620.11
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