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Modeling of magnetron sputtering plasmas

Shon, C. H. / Lee, J. K.

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Modeling of magnetron sputtering plasmas

Shon, C. H. / Lee, J. K.

Modeling of magnetron sputtering plasmas

Shon, C. H. / Lee, J. K.

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Order at Subito €

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Document information

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Document information

Title:

Modeling of magnetron sputtering plasmas

Contributors:

Shon, C. H. (author) / Lee, J. K. (author)

Published in:

APPLIED SURFACE SCIENCE ; 192 ; 258-269

Publication date:

2002-01-01

Size:

12 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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