Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Numerical Modeling of RF Magnetron Sputtering with Metallic or Dielectric Target
Numerical Modeling of RF Magnetron Sputtering with Metallic or Dielectric Target
Numerical Modeling of RF Magnetron Sputtering with Metallic or Dielectric Target
Makabe, T. (Autor:in) / Yagisawa, T. (Autor:in) / Uskokovic, D. P. / Milonjic, S. K. / Rakovic, D. I.
01.01.2007
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Modeling of magnetron sputtering plasmas
| British Library Online Contents | 2002
On the target surface cleanness during magnetron sputtering
| British Library Online Contents | 2015
On the target surface cleanness during magnetron sputtering
| British Library Online Contents | 2015
On the target surface cleanness during magnetron sputtering
| British Library Online Contents | 2015
An Investigation of Target Poisoning during Reactive Magnetron Sputtering
| BASE | 2009