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    Hf1-xSixOy dielectric films deposited by UV-photo-induced chemical vapour deposition (UV-CVD)

    New search for: Liu, M.
    New search for: Zhu, L. Q.
    New search for: He, G.
    New search for: Wang, Z. M.
    New search for: Wu, J. X.
    New search for: Zhang, J. Y.
    New search for: Liaw, I.
    New search for: Fang, Q.
    New search for: Boyd, I. W.

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    Hf1-xSixOy dielectric films deposited by UV-photo-induced chemical vapour deposition (UV-CVD)

    New search for: Liu, M.
    New search for: Zhu, L. Q.
    New search for: He, G.
    New search for: Wang, Z. M.
    New search for: Wu, J. X.
    New search for: Zhang, J. Y.
    New search for: Liaw, I.
    New search for: Fang, Q.
    New search for: Boyd, I. W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Hf1-xSixOy dielectric films deposited by UV-photo-induced chemical vapour deposition (UV-CVD)

    New search for: Liu, M.
    New search for: Zhu, L. Q.
    New search for: He, G.
    New search for: Wang, Z. M.
    New search for: Wu, J. X.
    New search for: Zhang, J. Y.
    New search for: Liaw, I.
    New search for: Fang, Q.
    New search for: Boyd, I. W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Hf1-xSixOy dielectric films deposited by UV-photo-induced chemical vapour deposition (UV-CVD)

    Contributors:

    Liu, M. (author) / Zhu, L. Q. (author) / He, G. (author) / Wang, Z. M. (author) / Wu, J. X. (author) / Zhang, J. Y. (author) / Liaw, I. (author) / Fang, Q. (author) / Boyd, I. W. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 253 ; 7869-7873

    Publication date:

    2007-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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