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Characterizations of elastic behaviors of silicon nitride thin films with varying thicknesses
Characterizations of elastic behaviors of silicon nitride thin films with varying thicknesses
Characterizations of elastic behaviors of silicon nitride thin films with varying thicknesses
Ren, Y. (author) / Lam, D. C. (author)
MATERIALS SCIENCE AND ENGINEERING A ; 467 ; 93-96
2007-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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