CVD of 6H-SiC on Non-Basal Quasi Polar Faces: Fid-Bau Portal

CVD of 6H-SiC on Non-Basal Quasi Polar Faces

Shishkin, Y. / Rao, S. P. / Kordina, O. / Agafonov, I. / Maltsev, A. A. / Hassan, J. / Henry, A. / Moisson, C. / Saddow, S. E.

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CVD of 6H-SiC on Non-Basal Quasi Polar Faces

Shishkin, Y. / Rao, S. P. / Kordina, O. / Agafonov, I. / Maltsev, A. A. / Hassan, J. / Henry, A. / Moisson, C. / Saddow, S. E.

CVD of 6H-SiC on Non-Basal Quasi Polar Faces

Shishkin, Y. / Rao, S. P. / Kordina, O. / Agafonov, I. / Maltsev, A. A. / Hassan, J. / Henry, A. / Moisson, C. / Saddow, S. E.

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Document information

Title:

CVD of 6H-SiC on Non-Basal Quasi Polar Faces

Contributors:

Shishkin, Y. (author) / Rao, S. P. (author) / Kordina, O. (author) / Agafonov, I. (author) / Maltsev, A. A. (author) / Hassan, J. (author) / Henry, A. (author) / Moisson, C. (author) / Saddow, S. E. (author) / Wright, N.

Published in:

Silicon Carbide and Related Materials 2006 ; 73-76

MATERIALS SCIENCE FORUM ; 556/557

Publication date:

2007-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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