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    Scaling of Chlorosilane SiC CVD to Multi-Wafer Epitaxy System

    New search for: Wan, J. W.
    New search for: Loboda, M. J.
    New search for: MacMillan, M. F.
    New search for: Chung, G. Y.
    New search for: Carlson, E. P.
    New search for: Torres, V. M.
    New search for: Wright, N.
    New search for: Johnson, C. M.
    New search for: Vassilevski, K.
    New search for: Nikitina, I.
    New search for: Horsfall, A.

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    Scaling of Chlorosilane SiC CVD to Multi-Wafer Epitaxy System

    New search for: Wan, J. W.
    New search for: Loboda, M. J.
    New search for: MacMillan, M. F.
    New search for: Chung, G. Y.
    New search for: Carlson, E. P.
    New search for: Torres, V. M.
    New search for: Wright, N.
    New search for: Johnson, C. M.
    New search for: Vassilevski, K.
    New search for: Nikitina, I.
    New search for: Horsfall, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Scaling of Chlorosilane SiC CVD to Multi-Wafer Epitaxy System

    New search for: Wan, J. W.
    New search for: Loboda, M. J.
    New search for: MacMillan, M. F.
    New search for: Chung, G. Y.
    New search for: Carlson, E. P.
    New search for: Torres, V. M.
    New search for: Wright, N.
    New search for: Johnson, C. M.
    New search for: Vassilevski, K.
    New search for: Nikitina, I.
    New search for: Horsfall, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Scaling of Chlorosilane SiC CVD to Multi-Wafer Epitaxy System

    Contributors:

    Wan, J. W. (author) / Loboda, M. J. (author) / MacMillan, M. F. (author) / Chung, G. Y. (author) / Carlson, E. P. (author) / Torres, V. M. (author) / Wright, N. / Johnson, C. M. / Vassilevski, K. / Nikitina, I.

    Published in:

    Silicon Carbide and Related Materials 2006 ; 145-148

    MATERIALS SCIENCE FORUM ; 556/557

    Publication date:

    2007-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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