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    Homoepitaxial Growth of 4H-SiC Using a Chlorosilane Silicon Precursor

    New search for: MacMillan, M. F.
    New search for: Loboda, M. J.
    New search for: Chung, G.
    New search for: Carlson, E.
    New search for: Wan, J.
    New search for: Devaty, R. P.
    New search for: Larkin, D. J.
    New search for: Saddow, S. E.

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    Homoepitaxial Growth of 4H-SiC Using a Chlorosilane Silicon Precursor

    New search for: MacMillan, M. F.
    New search for: Loboda, M. J.
    New search for: Chung, G.
    New search for: Carlson, E.
    New search for: Wan, J.
    New search for: Devaty, R. P.
    New search for: Larkin, D. J.
    New search for: Saddow, S. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Homoepitaxial Growth of 4H-SiC Using a Chlorosilane Silicon Precursor

    New search for: MacMillan, M. F.
    New search for: Loboda, M. J.
    New search for: Chung, G.
    New search for: Carlson, E.
    New search for: Wan, J.
    New search for: Devaty, R. P.
    New search for: Larkin, D. J.
    New search for: Saddow, S. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Homoepitaxial Growth of 4H-SiC Using a Chlorosilane Silicon Precursor

    Contributors:

    MacMillan, M. F. (author) / Loboda, M. J. (author) / Chung, G. (author) / Carlson, E. (author) / Wan, J. (author) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.

    Published in:

    Silicon Carbide and Related Materials - 2005 ; 175-178

    MATERIALS SCIENCE FORUM ; 527/529

    Publication date:

    2006-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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