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    FTIR Ellipsometry Analysis of the Internal Stress in SiC/Si MEMS

    New search for: Pezoldt, J.
    New search for: Forster, C.
    New search for: Cimalla, V.
    New search for: Will, F.
    New search for: Stephan, R.
    New search for: Bruckner, K.
    New search for: Hein, M.
    New search for: Ambacher, O.
    New search for: Wright, N.
    New search for: Johnson, C. M.
    New search for: Vassilevski, K.
    New search for: Nikitina, I.
    New search for: Horsfall, A.

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    FTIR Ellipsometry Analysis of the Internal Stress in SiC/Si MEMS

    New search for: Pezoldt, J.
    New search for: Forster, C.
    New search for: Cimalla, V.
    New search for: Will, F.
    New search for: Stephan, R.
    New search for: Bruckner, K.
    New search for: Hein, M.
    New search for: Ambacher, O.
    New search for: Wright, N.
    New search for: Johnson, C. M.
    New search for: Vassilevski, K.
    New search for: Nikitina, I.
    New search for: Horsfall, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    FTIR Ellipsometry Analysis of the Internal Stress in SiC/Si MEMS

    New search for: Pezoldt, J.
    New search for: Forster, C.
    New search for: Cimalla, V.
    New search for: Will, F.
    New search for: Stephan, R.
    New search for: Bruckner, K.
    New search for: Hein, M.
    New search for: Ambacher, O.
    New search for: Wright, N.
    New search for: Johnson, C. M.
    New search for: Vassilevski, K.
    New search for: Nikitina, I.
    New search for: Horsfall, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    FTIR Ellipsometry Analysis of the Internal Stress in SiC/Si MEMS

    Contributors:

    Pezoldt, J. (author) / Forster, C. (author) / Cimalla, V. (author) / Will, F. (author) / Stephan, R. (author) / Bruckner, K. (author) / Hein, M. (author) / Ambacher, O. (author) / Wright, N. / Johnson, C. M.

    Published in:

    Silicon Carbide and Related Materials 2006 ; 363-366

    MATERIALS SCIENCE FORUM ; 556/557

    Publication date:

    2007-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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