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Use of Graphite Cap to Reduce Unwanted Post-Implantation Annealing Effects in SiC
Use of Graphite Cap to Reduce Unwanted Post-Implantation Annealing Effects in SiC
Use of Graphite Cap to Reduce Unwanted Post-Implantation Annealing Effects in SiC
Oliviero, E. (author) / Lazar, M. (author) / Vang, H. (author) / Dubois, C. (author) / Cremillieu, P. (author) / Leclercq, J. L. (author) / Dazord, J. (author) / Planson, D. (author) / Wright, N. / Johnson, C. M.
2007-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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