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Optical and mechanical properties of alumina films fabricated on Kapton polymer by plasma immersion ion implantation and deposition using different biases
Optical and mechanical properties of alumina films fabricated on Kapton polymer by plasma immersion ion implantation and deposition using different biases
Optical and mechanical properties of alumina films fabricated on Kapton polymer by plasma immersion ion implantation and deposition using different biases
Huang, Y. (author) / Tian, X. (author) / Yang, S. (author) / Fu, R. K. (author) / Chu, P. K. (author)
APPLIED SURFACE SCIENCE ; 253 ; 9483-9488
2007-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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