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    Boron accumulation at epi-substrate silicon interface during epitaxial growth

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    New search for: Borghesi, A.
    New search for: Geddo, M.
    New search for: Sassella, A.

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    Boron accumulation at epi-substrate silicon interface during epitaxial growth

    New search for: Pivac, B.
    New search for: Borghesi, A.
    New search for: Geddo, M.
    New search for: Sassella, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Boron accumulation at epi-substrate silicon interface during epitaxial growth

    New search for: Pivac, B.
    New search for: Borghesi, A.
    New search for: Geddo, M.
    New search for: Sassella, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    Boron accumulation at epi-substrate silicon interface during epitaxial growth

    Contributors:

    Pivac, B. (author) / Borghesi, A. (author) / Geddo, M. (author) / Sassella, A. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 15 ; 32

    Publication date:

    1992-01-01

    Size:

    32 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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