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    Influence of N2 flow ratio on the properties of hafnium nitride thin films prepared by DC magnetron sputtering

    New search for: Yuan, L.
    New search for: Fang, G.
    New search for: Li, C.
    New search for: Wang, M.
    New search for: Liu, N.
    New search for: Ai, L.
    New search for: Cheng, Y.
    New search for: Gao, H.
    New search for: Zhao, X.

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    Influence of N2 flow ratio on the properties of hafnium nitride thin films prepared by DC magnetron sputtering

    New search for: Yuan, L.
    New search for: Fang, G.
    New search for: Li, C.
    New search for: Wang, M.
    New search for: Liu, N.
    New search for: Ai, L.
    New search for: Cheng, Y.
    New search for: Gao, H.
    New search for: Zhao, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Influence of N2 flow ratio on the properties of hafnium nitride thin films prepared by DC magnetron sputtering

    New search for: Yuan, L.
    New search for: Fang, G.
    New search for: Li, C.
    New search for: Wang, M.
    New search for: Liu, N.
    New search for: Ai, L.
    New search for: Cheng, Y.
    New search for: Gao, H.
    New search for: Zhao, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Influence of N2 flow ratio on the properties of hafnium nitride thin films prepared by DC magnetron sputtering

    Contributors:

    Yuan, L. (author) / Fang, G. (author) / Li, C. (author) / Wang, M. (author) / Liu, N. (author) / Ai, L. (author) / Cheng, Y. (author) / Gao, H. (author) / Zhao, X. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 253 ; 8538-8542

    Publication date:

    2007-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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