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Silicon-based thin films as bottom electrodes in chalcogenide nonvolatile memories

Lee, S. Y. / Yoon, S. M. / Choi, K. J. / Lee, N. Y. / Park, Y. S. / Ryu, S. O. / Yu, B. G. / Kim, S. H. / Lee, S. H.

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Silicon-based thin films as bottom electrodes in chalcogenide nonvolatile memories

Lee, S. Y. / Yoon, S. M. / Choi, K. J. / Lee, N. Y. / Park, Y. S. / Ryu, S. O. / Yu, B. G. / Kim, S. H. / Lee, S. H.

Silicon-based thin films as bottom electrodes in chalcogenide nonvolatile memories

Lee, S. Y. / Yoon, S. M. / Choi, K. J. / Lee, N. Y. / Park, Y. S. / Ryu, S. O. / Yu, B. G. / Kim, S. H. / Lee, S. H.

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Document information

Title:

Silicon-based thin films as bottom electrodes in chalcogenide nonvolatile memories

Contributors:

Lee, S. Y. (author) / Yoon, S. M. (author) / Choi, K. J. (author) / Lee, N. Y. (author) / Park, Y. S. (author) / Ryu, S. O. (author) / Yu, B. G. (author) / Kim, S. H. (author) / Lee, S. H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 312-315

Publication date:

2007-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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