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Influence on the laser induced backside dry etching of thickness and material of the absorber, laser spot size and multipulse irradiation
Influence on the laser induced backside dry etching of thickness and material of the absorber, laser spot size and multipulse irradiation
Influence on the laser induced backside dry etching of thickness and material of the absorber, laser spot size and multipulse irradiation
Smausz, T. (author) / Csizmadia, T. (author) / Kresz, N. (author) / Vass, C. (author) / Marton, Z. (author) / Hopp, B. (author)
APPLIED SURFACE SCIENCE ; 254 ; 1091-1095
2007-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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