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    Effect of substrate temperature on the adhesion properties of magnetron sputtered nano-composite Si–C–N hard thin films

    New search for: Mishra, S. K.
    New search for: Bhattacharyya, A. S.

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    Effect of substrate temperature on the adhesion properties of magnetron sputtered nano-composite Si–C–N hard thin films

    New search for: Mishra, S. K.
    New search for: Bhattacharyya, A. S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of substrate temperature on the adhesion properties of magnetron sputtered nano-composite Si–C–N hard thin films

    New search for: Mishra, S. K.
    New search for: Bhattacharyya, A. S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Title:

    Effect of substrate temperature on the adhesion properties of magnetron sputtered nano-composite Si–C–N hard thin films

    Contributors:

    Mishra, S. K. (author) / Bhattacharyya, A. S. (author)

    Published in:

    MATERIALS LETTERS ; 62 ; 398-402

    Publication date:

    2008-01-01

    Size:

    5 pages

    ISSN:

    0167-577X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1105 / 530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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