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Aqueous chemical solution deposition of ultrathin lanthanide oxide dielectric films

Hardy, A. / Van Elshocht, S. / D Haen, J. / Douheret, O. / De Gendt, S. / Adelmann, C. / Caymax, M. / Conard, T. / Witters, T. / Bender, H.

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Aqueous chemical solution deposition of ultrathin lanthanide oxide dielectric films

Hardy, A. / Van Elshocht, S. / D Haen, J. / Douheret, O. / De Gendt, S. / Adelmann, C. / Caymax, M. / Conard, T. / Witters, T. / Bender, H.

Aqueous chemical solution deposition of ultrathin lanthanide oxide dielectric films

Hardy, A. / Van Elshocht, S. / D Haen, J. / Douheret, O. / De Gendt, S. / Adelmann, C. / Caymax, M. / Conard, T. / Witters, T. / Bender, H.

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Title:

Aqueous chemical solution deposition of ultrathin lanthanide oxide dielectric films

Contributors:

Hardy, A. (author) / Van Elshocht, S. (author) / D Haen, J. (author) / Douheret, O. (author) / De Gendt, S. (author) / Adelmann, C. (author) / Caymax, M. (author) / Conard, T. (author) / Witters, T. (author) / Bender, H. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 22 ; 3484-3493

Publication date:

2007-01-01

Size:

10 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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